Summary Conclusions Recommendations Research Paper

Although an impressive arsenal of both experimental and numerical tools has been developed, significant gaps in understanding and lack of instrumentation limit progress.

The broad interdisciplinary nature of plasma processing is highlighted in the discussion of education issues outlined in Chapter 5, which addresses the challenges and opportunities associated with providing a science education in the area of plasma processing.

Summary Conclusions Recommendations Research Paper-89Summary Conclusions Recommendations Research Paper-25

The scientific underpinnings of plasma applications are multidisciplinary and include elements of electrodynamics, atomic science, surface science, computer science, and industrial process control.Understanding this problem requires knowledge and expertise drawn from plasma physics, atomic physics, condensed matter physics, chemistry, chemical engineering, electrical engineering, materials science, computer science, and computer engineering. laboratories have made many excellent contributions to plasma processing research—making fundamental discoveries, developing numerical algorithms, and inventing new diagnostic techniques. Specifically, plasma processing is an essential element in the synthesis and processing arsenal for manufacturing electronic, photonic, ceramic, composite, high-performance metal, and alloy materials.In the absence of a coordinated approach, the diversity of the applications and of the science tends to diffuse the focus of both. However, poor coordination and inefficient transfer of insights gained from this research have inhibited its use in the design of new plasma reactors and processes. : Currently, computer-based modeling and plasma simulation are inadequate for developing plasma reactors.In this country, the plasma equipment industry is composed of many small companies loosely connected to integrated circuit manufacturers.In Japan, on the other hand, equipment vendors and device manufacturers are tightly linked and are often parts of the same company.Because of the diversity of applications and the multidisciplinary nature of the science, scientific understanding lags technology. A summary of the many industrial applications of plasma-based systems for processing materials is included in Chapter 2.Electronics and aerospace are the two major industries that are served by plasma processing technologies, although the automotive industry is likely to become a significant user of plasma-processed materials like those now in widespread use in the aerospace industry.This study focuses on the plasma processing of materials, a technology that impacts and is of vital importance to several of the largest manufacturing industries in the world.Foremost among these industries is the electronics industry, in which plasma-based processes are indispensable for the manufacture of very large-scale integrated (VLSI) microelectronic circuits (or chips).For example, graduate programs specifically focused on plasma processing are rare because of insufficient funding of university research programs in this field.By contrast, both Japan and France have national initiatives that support education and research in plasma processing.

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